A New Motor of Stick Type with Coupled Mechanical Vibration of Bimorph Beam and Frictional Force

This paper proposes a new non‐magnetic motor with a rotor rotated by using the resonance en‐ ergy of a bimorph cantilever beam excited by electrostatic force. The use of flexible material en‐ ables conversion of translational vibration to rotary movement in one direction. Basic character‐ istics of a prototype motor with two bimorph cantilever beams, such as rotational speed, output torque, and efficiency were determined experimentally. Results show that a maximum rotational speed of 2800 rpm was obtained without a load torque. It is also observed that this motor pro‐ duces the output torque of 98 μNm when the rotational speed was 980 rpm. The maximum effi‐ ciency was 24% when the input power was 0.065 W.